Phosphorus effusion source

Details Phosphorus effusion source Phosphorus effusion source

1997-07-03

2000-02-29

Bueker, Richard

Coating apparatus

Gas or vapor deposition

Multizone chamber

118726, C23C 1400

Patent

active

060304588

ABSTRACT:
This invention is a sublimating and cracking apparatus for producing a beam of molecules to be deposited on a substrate, and an apparatus which is particularly useful with phosphorus as the source material. In the phosphorus effusion cell of this invention, a vacuum jacket encloses and supports a red phosphorus crucible, a condensing crucible for white phosphorus and a connecting tube within a vacuum space. In use, red phosphorus is first transformed and deposited as white phosphorus in the condensing chamber. The white phosphorus is then directed to a cracker section where it is cracked and subsequently directed to the substrate.

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Copy of International Search Report for counterpart International Application No. PCT/US98/02783.

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