Patterned thin-film deposition using collimating heated...

Details Patterned thin-film deposition using collimating heated... Patterned thin-film deposition using collimating heated...

2006-10-03

2006-10-03

Bueker, Richard (Department: 1763)

Coating apparatus

Gas or vapor deposition

Having means to expose a portion of a substrate to coating...

C118S724000, C118S726000

Reexamination Certificate

active

07115168

ABSTRACT:
Scanning localized evaporation and deposition of an evaporant on a substrate utilizes a mask assembly comprised of a series of mask elements with openings thereon and spaced apart in a stack. The openings are aligned so as to direct the evaporant therethrough onto the substrate. The mask elements are heated and the stack may include a movable shutter element to block openings in adjacent mask elements. The evaporant streams are usually vertical but some may be oblique to the substrate, and they may be of different materials.

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