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Inverted diffuser stagnation point flow reactor for vapor deposi

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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Inverted positive vertical flow chemical vapor deposition reacto

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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Ion beam coating apparatus

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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Ion beam deposition apparatus

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Ion beam source with gas introduced directly into...

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Ion bombardment device with high frequency

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Ion flow forming method and apparatus

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Ion implantation control using charge collection, optical emissi

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Ion implantation ion source, system and method

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Ion implantation ion source, system and method

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Ion implanters for implanting shallow regions with ion dopant co

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Ion plating apparatus that prevents wasteful consumption of evap

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Ion plating device and ion plating method

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Ionization deposition apparatus

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Ionizer for gas cluster ion beam formation

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Isolation chamber arrangement for serial processing of...

Coating apparatus – Gas or vapor deposition – Multizone chamber
Reexamination Certificate

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Isolation of incompatible processes in a multi-station processin

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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Isolation passageway including annular region

Coating apparatus – Gas or vapor deposition – Running length work
Patent

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