Ion beam coating apparatus

Details Ion beam coating apparatus Ion beam coating apparatus

1982-09-24

1984-04-03

Lawrence, Evan K.

Coating apparatus

Gas or vapor deposition

Multizone chamber

118 501, 118723, 204192N, 204298, C23C 1308

Patent

active

044401086

ABSTRACT:
A coating apparatus and method for coating industrial cutting and turning tools of any desired shape and configuration and the like significantly to improve the tools' working properties. The coating is formed of cubic boron nitride, with a preferred thickness not exceeding ten microns. The coating apparatus includes an rf excited plasma source chamber having a gas feed ring for ionizing a gas admitted into the chamber via the ring. The preferred feed gas is a borazine and benzene vapor mixture. A coating chamber is mounted adjacent to and contiguous with the plasma source chamber via a neck portion. The coating chamber includes a vacuum interlock to permit the entry and removal of a tool transport. At least one vacuum pump is operatively connected to the chamber. Preferably, a plurality of permanent magnets and electron supply filaments are arranged circumferentially about the plasma source chamber. Preferably, the tool transport is rotatable during coating. Preferably, the apparatus is microprocessor controlled.

REFERENCES:
patent: 3616452 (1971-10-01), Bessot et al.
T. Takagi et al., "Ion Beam Epitaxial Technique and Applications", Thin Solid Films 63 (1979), pp. 41 et seq.
S. Aisenberg et al., "Ion-Beam Deposition of Thin Films of Diamond like Carbon", J. of Applied Physics, vol. 42, No. 7 (Jun. 1971), pp. 2953-2958.
C. Weissmantel et al., "Structure and Properties of Quasi-Amorphous Films . . . ", Thin Solid Films, 72 (1980), pp. 19-31.
C. Weissmantel, "Ion Beam Deposition of Special Film Structures", J. Vac. Sci. Technol., 18 (2), Mar. 1981, pp. 179-185.
G. Carter et al., "The Interaction of Low Energy Ion Beams with Surfaces," Thin Solid Films, 80 (1981), pp. 13-29.
M. Wakatsuki et al., "Synthesis of Polycrystalline Cubic BN", Mat. Res. Bull., vol. 7, pp. 999-1004, 1972.
G. Gautherin et al., "Some Trends in Preparing Film Structures . . . ", Thin Solid Films, 50 (1978), pp. 135 et seq.
C. Weissmantel et al., "Preparation of Hard Coatings by Ion Beam Methods," Thin Solid Films, 63 (1979), pp. 315-325.

Affiliated with

Also associated with

Rating

Ion beam coating apparatus does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Ion beam coating apparatus, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Ion beam coating apparatus will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-662217