Isolation passageway including annular region

Details Isolation passageway including annular region Isolation passageway including annular region

1986-01-16

1988-02-09

Lawrence, Evan K.

Coating apparatus

Gas or vapor deposition

Running length work

118 501, 118719, 118723, 118900, C23C 1650, C23C 1654

Patent

active

047235071

ABSTRACT:
A passageway which includes an annular region, the passageway adapted to isolate the gaseous contents of one of a pair of adjacent, vacuumized environments from the other of the pair while providing for the movement of a substrate therebetween.

REFERENCES:
patent: 2925062 (1960-02-01), Schwindt
patent: 2971862 (1961-02-01), Baer et al.
patent: 4601260 (1986-07-01), Ovshinsky
patent: 4612206 (1986-09-01), Shimozato et al.

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