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Heat treatment device

Coating apparatus – Gas or vapor deposition
Reexamination Certificate

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Heat treatment furnace with an exhaust baffle

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Heat treatment processing apparatus and cleaning method thereof

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Heat treatment system and method

Coating apparatus – Gas or vapor deposition
Reexamination Certificate

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Heat treatment system using ring-shaped radiation heater...

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Heat treatment unit, cooling unit and cooling treatment method

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Heat-resistant electrode material, electrode using the same, and

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Heat-treating apparatus

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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Heat-treating apparatus

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Heat-treating apparatus and heat-treating method

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Heated chuck for laser thermal processing

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Heated electrostatic particle trap for in-situ vacuum line...

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Heated gas box for PECVD applications

Coating apparatus – Gas or vapor deposition
Reexamination Certificate

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Heated gas distribution plate for a processing chamber

Coating apparatus – Gas or vapor deposition
Reexamination Certificate

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Heated gas line body feedthrough for vapor and gas delivery...

Coating apparatus – Gas or vapor deposition
Reexamination Certificate

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Heater block having catalyst spray means

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Heater for CVD apparatus

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Heater for processing chamber

Coating apparatus – Gas or vapor deposition
Reexamination Certificate

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Heater for use in substrate processing apparatus to deposit...

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Heater temperature uniformity qualification tool

Coating apparatus – Gas or vapor deposition – Work support
Reexamination Certificate

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