Heat treatment furnace with an exhaust baffle

Details Heat treatment furnace with an exhaust baffle Heat treatment furnace with an exhaust baffle

1995-05-26

1996-11-05

Kunemund, Robert

Coating apparatus

Gas or vapor deposition

With treating means

118715, 432152, 432242, 432250, C23C 1600

Patent

active

055713335

ABSTRACT:
A heat treatment furnace has a reaction tube with one open end and a detachable front cap with an exhaust port provided such that it closes the opening of the reaction tube. A detachable inner tube is provided in an opening of the reaction tube wherein the inner tube has a cylindrical side whose diameter is smaller than the inner diameter of the reaction tube. A disk-shaped end is located such that there is a space between the disk-shaped end and the front cap and it has a through hole(s).

REFERENCES:
patent: 3805736 (1974-04-01), Foehring
patent: 4573431 (1986-03-01), Sarkozy
patent: 4699805 (1987-10-01), Seelbach
patent: 5070814 (1991-12-01), Whiffin
patent: 5203925 (1993-04-01), Shibuya

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