Heat-resistant electrode material, electrode using the same, and

Details Heat-resistant electrode material, electrode using the same, and Heat-resistant electrode material, electrode using the same, and

1997-01-13

1997-12-16

Niebling, John

Coating apparatus

Gas or vapor deposition

With treating means

118723ER, 156345, C23C 1600

Patent

active

056980353

ABSTRACT:
A heat-resistive electrode material substantially consisting of 40 to 60 wt % of at least one of ZrB.sub.2 and TiB.sub.2, 20 to 50 wt % of BN, and not more than 30 wt % of AlN is disclosed. This heat-resistive electrode material is used in at least portions of electrodes of an apparatus having a plasma generating unit, e.g., an ion source, a plasma etching apparatus, or a plasma CVD apparatus, that contacts a plasma.

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