Coating apparatus – Gas or vapor deposition
Reexamination Certificate
2006-08-15
2006-08-15
Zervigon, Rudy (Department: 1763)
Coating apparatus
Gas or vapor deposition
C118S722000, C118S724000, C118S666000, C156S345240, C156S345270, C156S345280, C156S345370
Reexamination Certificate
active
07090727
ABSTRACT:
A feedthrough device for use in deposition chambers such as chemical vapor deposition chambers and atomic layer deposition chambers and methods using the same in association with such chambers as well as chambers so equipped. The feedthrough device includes an associated heating device to maintain the temperature of the feedthrough device above a predetermined level and thus maintain a temperature differential between the deposition chamber body and a vaporized organometallic precursor as it passes therethrough. The feedthrough device may include a helical groove formed along the surface of a longitudinal body portion thereof to complementarily receive a resistance type cable heater. The heater may further include a temperature sensing device to assist in monitoring and controlling the temperature of the feedthrough device.
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Merriam-Webster's Collegiate Dictionary—10th Ed. p. 1223.
Cantin Raynald B.
Carpenter Craig M.
TraskBritt
Zervigon Rudy
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