Heat-treating apparatus

Details Heat-treating apparatus Heat-treating apparatus

1993-07-26

1994-10-25

Breneman, R. Bruce

Coating apparatus

Gas or vapor deposition

With treating means

118715, 118725, 118733, 219395, 219400, 219411, 285364, 285911, C23C 1600

Patent

active

053591488

ABSTRACT:
A heat-treating apparatus has a reaction vessel being adapted for performing a heat process for a workpiece to be treated and having a joint pipe portion and an outer pipe jointed to the joint pipe portion and of the reaction vessel. A sealing member is disposed between the outer pipe and the joint pipe portion. The sealing member has a relatively soft core member and a film harder than the core member. The film is disposed on the surface of the core member and has a heat resistance and a chemical resistance. Since the core member of the sealing portion has flexibility, it easily deforms corresponding to the shape of the sealing portion. The film provided on the core member prevents the sealing member from thermally adhering to the sealing portion and from thermally deteriorating.

REFERENCES:
patent: 4448448 (1984-05-01), Pollia
patent: 4466641 (1984-08-01), Heilman et al.
patent: 4527818 (1985-07-01), Rundell

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