Heat treatment system and method

Details Heat treatment system and method Heat treatment system and method

2005-03-08

2005-03-08

Lund, Jeffrie R. (Department: 1763)

Coating apparatus

Gas or vapor deposition

C118S724000, C118S725000, C432S120000, C432S152000, C432S200000, C432S205000

Reexamination Certificate

active

06863732

ABSTRACT:
The present invention relates generally to a heat treatment system and method for heat-treating an object to be treated. Particularly, the invention relates to a heat treatment system wherein an object to be treated is carried in a reaction vessel, which has been pressure-reduced to a predetermined degree of vacuum and the interior of which is heated to a predetermined process temperature, and a process gas is supplied into the reaction vessel via a gas feed passage to process the object.

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