Heater block having catalyst spray means

Details Heater block having catalyst spray means Heater block having catalyst spray means

2005-01-25

2005-01-25

Tran, Hien (Department: 1764)

Coating apparatus

Gas or vapor deposition

With treating means

C118S728000, C118S715000, C156S345520

Reexamination Certificate

active

06846364

ABSTRACT:
A heater block installed within a chamber in the chemical vapor deposition (CVD) apparatus used to manufacture a semiconductor device is described. The heater block includes a catalyst spraying device comprising a support section, an upper plate coupled to an upper portion of the support section and having a projection section at an edge of the upper plate, and a heater installed at prominences and depressions of the upper plate formed of the projection section and constructed so that a wafer can be located on an upper portion of the upper plate. Catalyst is supplied through passages formed within the support section and the upper plate and is uniformly sprayed onto a surface of the wafer via a plurality of spray holes formed at the projection section.

REFERENCES:
patent: 5192370 (1993-03-01), Oda et al.
patent: 5772771 (1998-06-01), Li et al.
patent: 9-181065 (1997-07-01), None
patent: 97-0077163 (1997-12-01), None

Affiliated with

Also associated with

Rating

Heater block having catalyst spray means does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Heater block having catalyst spray means, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Heater block having catalyst spray means will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3437007