Bell of opaque fused silica

Details Bell of opaque fused silica Bell of opaque fused silica

1983-02-18

1985-02-05

Smith, John D.

Coating apparatus

Gas or vapor deposition

Chamber seal

118715, 118724, 432251, C23C 1308

Patent

active

044972776

ABSTRACT:
A bell made of opaque fused silica and intended for use in the deposition of polycrystalline silicon is assembled from at least three individual sections. The sections are joined to one another at end flanges with gaskets between the flanges. The lengths of the individual sections are determined by the temperature distribution along the bell in use.

REFERENCES:
patent: 2858795 (1958-11-01), Walker
patent: 2862307 (1958-12-01), Bloomer et al.
patent: 3492969 (1970-02-01), Emeis
patent: 3701682 (1972-10-01), Gartman et al.
patent: 4081236 (1978-03-01), Corbett
Quartz Glass for the Semi-Conductor Technology, Pamphlet #Q-B 3/113, Heraeus Quarzschmelze GmbH, West Germany, Sep. 1979.
Wade Technical Report 59-363, Found in "U.S. Govt. Research Reports", vol. 33, No. 5, p. 495, 5-13-1960.
Roth, "Vacuum Sealing Techniques, Pergamon Press, 1966, pp. 30, 306, 307, 324 and 325.

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