Barrier coating for vitreous materials

Details Barrier coating for vitreous materials Barrier coating for vitreous materials

2007-01-23

2007-01-23

Zervigon, Rudy (Department: 1763)

Coating apparatus

Gas or vapor deposition

C156S345290

Reexamination Certificate

active

09828550

ABSTRACT:
A chemical vapor deposition apparatus comprises a reaction chamber and one or more vitreous components having an outer surface that is covered at least in part by a devitrification barrier layer. In some arrangements, the one or more vitrious components can include a thermocouple. In a preferred arrangement, the devitrification barrier coating is formed from silicon nitride, which can be deposited on the vitreous component using chemical vapor deposition (CVD).

REFERENCES:
patent: 154695 (1874-09-01), Manly
patent: 3011006 (1961-11-01), Nicholson
patent: 4377347 (1983-03-01), Hanmyo et al.
patent: 4592307 (1986-06-01), Jolly
patent: 4692556 (1987-09-01), Bollen et al.
patent: 4976996 (1990-12-01), Monkowski et al.
patent: 4978567 (1990-12-01), Miller
patent: 4984904 (1991-01-01), Nakano et al.
patent: 5027746 (1991-07-01), Frijlink
patent: 5065698 (1991-11-01), Koike
patent: 5104514 (1992-04-01), Quartarone
patent: 5246500 (1993-09-01), Samata et al.
patent: 5271967 (1993-12-01), Kramer et al.
patent: 5315092 (1994-05-01), Takahashi et al.
patent: 5336327 (1994-08-01), Lee
patent: 5360269 (1994-11-01), Ogawa et al.
patent: 5421893 (1995-06-01), Perlov
patent: 5456761 (1995-10-01), Auger et al.
patent: 5474618 (1995-12-01), Allaire
patent: 5493987 (1996-02-01), McDiarmid et al.
patent: 5514439 (1996-05-01), Sibley
patent: 5562774 (1996-10-01), Breidenbach et al.
patent: 5571333 (1996-11-01), Kanaya
patent: 5788799 (1998-08-01), Steger et al.
patent: 5902407 (1999-05-01), deBoer et al.
patent: 5904778 (1999-05-01), Lu et al.
patent: 5910221 (1999-06-01), Wu
patent: 6056823 (2000-05-01), Sajoto et al.
patent: 6066209 (2000-05-01), Sajoto et al.
patent: 6120640 (2000-09-01), Shih et al.
patent: 6129808 (2000-10-01), Wicker et al.
patent: 6170429 (2001-01-01), Schoepp et al.
patent: 6227140 (2001-05-01), Kennedy et al.
patent: 6325858 (2001-12-01), Wengert et al.
patent: 6342691 (2002-01-01), Johnsgard et al.
patent: 2003/0035905 (2003-02-01), Lieberman et al.
patent: 0 229 488 (1986-12-01), None
patent: 95309495.0 (1995-12-01), None
patent: 5-64627 (1993-05-01), None
patent: WO95/31582 (1995-11-01), None
patent: WO97/06288 (1997-02-01), None
patent: WO 99/23276 (1999-05-01), None
patent: 01/11223 (2002-11-01), None
J. Linke and E. Vietzke, “Behavior of Boron Doped Graphites, Plasma Sprayed Boron Carbides and a-C/B:H as Plasma Facing Material”, J. Fusion Tech. V.20, pp. 228-231, Sep. 1991.
Srihari Ponnekanti et al, “Failure mechanisms of anodized aluminum parts used in chemical vapor deposition chambers”, J. Vac. Sci. Technol. A 14(3), May 1, 1996.
Introduction to Materials Science for Engineers, 3rd Ed. James F. Shackelford, 1992 Macmillan Publishing Co., pp. 398.
Pending Application: U.S. Appl. No. 09/184,490, filed Nov. 2, 1998, entitled Long Life High Temperature Process Chamber, in the name of Wengert et al. and assigned to ASM America, Inc.

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