Contoured platen design for plasma immerson ion implantation

Controlling edge deposition on semiconductor substrates

Cooling gas delivery system for a rotatable semiconductor...

Cross-flow diffusion furnace

CVD apparatus and process for the preparation of fiber-reinforce

CVD coating device

CVD film forming method in which a film formation preventing...

CVD reactor with substrate holder which is rotatably driven...

CVD reactor with uniform layer depositing ability

Cylindrical apparatus for growth of epitaxial layers

Depositing polysilicon films having improved uniformity and...

Deposition ring anti-rotation apparatus

Device comprising a flat susceptor rotating parallel to a refere

Device for holding disk-shaped substrates in the vacuum chamber

Device for mounting a substrate and method for producing an...

Device to cover a flat surface with a layer of uniform thickness

Diagnostic pedestal assembly for a semiconductor wafer processin

Differential pressure CVD chuck

Distributed source assembly

Door closure apparatus for encapsulating a wafer paddle