Device comprising a flat susceptor rotating parallel to a refere

Details Device comprising a flat susceptor rotating parallel to a refere Device comprising a flat susceptor rotating parallel to a refere

1995-01-09

1995-11-21

Breneman, R. Bruce

Coating apparatus

Gas or vapor deposition

Work support

118500, 406 87, 406 88, 406 92, 108138, C23C 1600, B05C 1300

Patent

active

054682991

ABSTRACT:
A device comprising a flat susceptor (14) rotating parallel to a reference surface (30) about a rotary shaft (20) perpendicular to this surface and comprising means for obtaining the stability of the susceptor held in sustentation and means for obtaining its rotary movement, is characterized in that these means are constituted by the ferromagnetic elements (11) in the susceptor, of the rotary shaft, of the reference surface, of a magnetic actuating assembly (70), and of a gas inlet (40).

REFERENCES:
patent: 3332656 (1967-07-01), Johnson
patent: 3662708 (1972-05-01), Shrader
patent: 3783822 (1974-01-01), Wollam
patent: 3797452 (1974-03-01), Dobson
patent: 4386255 (1983-05-01), Berkman
patent: 4512284 (1985-04-01), Robinson
patent: 4793911 (1988-12-01), Kemmerer
patent: 4860687 (1989-08-01), Frijlink
patent: 4945774 (1990-08-01), Beard
patent: 5010563 (1991-04-01), Laurent
patent: 5113102 (1992-05-01), Gilmore
Philips Power Semiconductor Applications, 1991, pp. 3-65 to 3-78, by Philips Semiconductors.

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