Coating apparatus – Gas or vapor deposition – Work support
Patent
1993-12-01
1994-09-27
Bueker, Richard
Coating apparatus
Gas or vapor deposition
Work support
118730, 118503, C23C 1600
Patent
active
053504550
ABSTRACT:
A flat rectangular substrate bed (3) having opposed parallel endwalls (14) and parallel sidewalls (16) receives a pair of clamping jaws (4) each having an L-shaped cross-section with a short limb against each sidewall and a long limb extending halfway over the top surface of the substrate bed. The long limbs (6) have arcuate recesses (7) which cooperate to surround the substrates (2) and thereby center and hold them. The two clamping jaws (4) are held by end bars (11) which are tightly joined to the substrate bed (3) by means of pins (10) and (12) received in respective bores (9) in the jaws and (13) in the endwalls.
REFERENCES:
patent: 4535835 (1985-08-01), Holden
patent: 4796562 (1989-01-01), Brors
patent: 4823736 (1989-04-01), Post
patent: 5138974 (1992-08-01), Ciparisso
Bueker Richard
Leybold Aktiengesellschaft
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