Device for holding disk-shaped substrates in the vacuum chamber

Details Device for holding disk-shaped substrates in the vacuum chamber Device for holding disk-shaped substrates in the vacuum chamber

1993-12-01

1994-09-27

Bueker, Richard

Coating apparatus

Gas or vapor deposition

Work support

118730, 118503, C23C 1600

Patent

active

053504550

ABSTRACT:
A flat rectangular substrate bed (3) having opposed parallel endwalls (14) and parallel sidewalls (16) receives a pair of clamping jaws (4) each having an L-shaped cross-section with a short limb against each sidewall and a long limb extending halfway over the top surface of the substrate bed. The long limbs (6) have arcuate recesses (7) which cooperate to surround the substrates (2) and thereby center and hold them. The two clamping jaws (4) are held by end bars (11) which are tightly joined to the substrate bed (3) by means of pins (10) and (12) received in respective bores (9) in the jaws and (13) in the endwalls.

REFERENCES:
patent: 4535835 (1985-08-01), Holden
patent: 4796562 (1989-01-01), Brors
patent: 4823736 (1989-04-01), Post
patent: 5138974 (1992-08-01), Ciparisso

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