Semiconductor wafer support lift-pin assembly

Details Semiconductor wafer support lift-pin assembly Semiconductor wafer support lift-pin assembly

2005-10-25

2005-10-25

Hassanzadeh, Parviz (Department: 1763)

Coating apparatus

Gas or vapor deposition

Work support

C118S724000, C118S725000, C118S500000, C118S715000, C156S345510, C156S345520, C156S345530, C204S192100, C204S298010, C361S234000, C279S128000, C279S003000

Reexamination Certificate

active

06958098

ABSTRACT:
A modular lift-pin assembly includes a lift-pin having a distal end, a connector, and an actuator pin. The connector includes an actuator end having a plurality of catch fingers disposed around the actuator end. Each of the plurality of catch fingers includes a lip extending radially inwards. A lift-pin end is coupled to the distal end of the lift-pin, and the actuator pin is coupled to the actuator end of the connector.

REFERENCES:
patent: 4431473 (1984-02-01), Okano et al.
patent: 5215619 (1993-06-01), Cheng et al.
patent: 5350479 (1994-09-01), Collins et al.
patent: 5669977 (1997-09-01), Shufflebotham et al.
patent: 5796066 (1998-08-01), Guyot
patent: 5956837 (1999-09-01), Shiota et al.
patent: 05129421 (1993-05-01), None
Pang et al. “Apparatus for Cleaning a Semiconductor Process Chamber” U.S. Appl. No. 09/721,060, filed Nov. 21, 2000.

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