Shape memory alloy lift pins for semiconductor processing equipm

Details Shape memory alloy lift pins for semiconductor processing equipm Shape memory alloy lift pins for semiconductor processing equipm

1995-12-22

1997-09-23

Bueker, Richard

Coating apparatus

Gas or vapor deposition

Work support

118729, 118500, 156345, C23C 1600

Patent

active

056699778

ABSTRACT:
A lift pin arrangement for use in semiconductor processing apparatus wherein the lift pins are of a shape memory alloy. The lift pins exhibit superelasticity and/or shape memory effects which allows the lift pins to withstand substantial bending forces without permanent deformation thereof, and in the case where the lift pins become deformed it is possible to restraighten the lift pins simply by heating the lift pins to an appropriate temperature.

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