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Apparatus for reaction treatment

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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Apparatus for servicing vacuum chamber using non-reactive gas fi

Coating apparatus – Gas or vapor deposition – Multizone chamber
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Apparatus for the deposition of multi-layer coatings

Coating apparatus – Gas or vapor deposition – Multizone chamber
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Apparatus for the insertion and removal of a mask through the ai

Coating apparatus – Gas or vapor deposition – Multizone chamber
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Apparatus for transporting substrates

Coating apparatus – Gas or vapor deposition – Multizone chamber
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Apparatus for transporting substrates in a vacuum coating system

Coating apparatus – Gas or vapor deposition – Multizone chamber
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Apparatus for treating wafers in the manufacture of semiconducto

Coating apparatus – Gas or vapor deposition – Multizone chamber
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Apparatus for vaporizing solid coating reactants

Coating apparatus – Gas or vapor deposition – Multizone chamber
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Apparatus of chemical vapor for producing layer variation by pla

Coating apparatus – Gas or vapor deposition – Multizone chamber
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Apparatus of metal organic chemical vapor deposition for growing

Coating apparatus – Gas or vapor deposition – Multizone chamber
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Apparatus to provide a vaporized reactant for chemical-vapor dep

Coating apparatus – Gas or vapor deposition – Multizone chamber
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Apparatus used for fabricating liquid crystal device and...

Coating apparatus – Gas or vapor deposition – Multizone chamber
Reexamination Certificate

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Architecture for high throughput semiconductor processing...

Coating apparatus – Gas or vapor deposition – Multizone chamber
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Assembly for processing substrates

Coating apparatus – Gas or vapor deposition – Multizone chamber
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Assembly for processing substrates

Coating apparatus – Gas or vapor deposition – Multizone chamber
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Atmospheric pressure chemical vapor deposition apparatus

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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Atmospheric pressure CVD apparatus

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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Atmospheric substrate processing apparatus for depositing...

Coating apparatus – Gas or vapor deposition – Multizone chamber
Reexamination Certificate

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Atomic layer deposition apparatus and method

Coating apparatus – Gas or vapor deposition – Multizone chamber
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Atomic layer deposition apparatus and method

Coating apparatus – Gas or vapor deposition – Multizone chamber
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