Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent
1979-09-12
1981-11-03
Smith, John D.
Coating apparatus
Gas or vapor deposition
Multizone chamber
118DIG5, 118718, 118724, C23C 1100, C23C 1312
Patent
active
042979714
ABSTRACT:
An apparatus is disclosed for fluidizing and vaporizing particulate solid coating reactants by first establishing a fluidized bed of dispersed particulate solid coating reactants and thereafter drawing a volume of fluidizing gas and suspended particulate solid coating reactant to a vaporizer while mixing an additional volume of gas therewith and then vaporizing the dispersed particulate solid coating reactant in the reactant-gas mixture. The reactant-gas mixture is then directed into contact with a hot substrate to be coated in order to deposit a film thereon.
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Plantz Bernard F.
PPG Industries Inc.
Seidel Donna L.
Smith John D.
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