Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent
1988-03-07
1989-07-04
Bueker, Richard
Coating apparatus
Gas or vapor deposition
Multizone chamber
118715, 118725, C23C 1600
Patent
active
048440060
ABSTRACT:
An apparatus to provide a vaporized reactant for chemical-vapor deposition is disclosed. The apparatus employs a heated quartz reactant reservoir, quartz lines, a quartz valve and, optionally, a purge system. The apparatus may also include a quartz refill reservoir and heating means for the quartz lines. The purge system may be a vacuum purge system.
REFERENCES:
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patent: 4446817 (1984-05-01), Crawley
patent: 4568397 (1986-02-01), Hoke et al.
patent: 4596208 (1986-06-01), Wolfson et al.
patent: 4640221 (1987-02-01), Barbee et al.
patent: 4747367 (1988-05-01), Posa
patent: 4761269 (1988-08-01), Conger et al.
"Model 425-MCT MOCVD HgCdTe Epitaxial Reactor", Crystal Specialities, Inc. 1986, Portland Oregon.
Boydston Thomas F.
Page, Jr. Theron V.
Posa John G.
Akzo America Inc.
Bueker Richard
Morris Louis A.
Vickrey David H.
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