Apparatus for the insertion and removal of a mask through the ai

Details Apparatus for the insertion and removal of a mask through the ai Apparatus for the insertion and removal of a mask through the ai

1993-12-07

1994-10-11

Bueker, Richard

Coating apparatus

Gas or vapor deposition

Multizone chamber

118721, 414217, 20429811, 20429825, 20429835, C23C 1400

Patent

active

053543807

ABSTRACT:
A plunger (14) is displaceably mounted in a vacuum chamber (42) and movable on a first linear path into the plane of substrate (20), for the mounting and for the transport of the mask (15) provided with a bore (32) receiving the plunger (14). A slide (41) having a forked extremity is movable from an airlock chamber (39) transverse to the first linear path to engage an annular flange of the mask (15). In a return movement the mask is transported into the removal airlock chamber (39) from which the mask is then removable by means of a removal plunger (48).

REFERENCES:
patent: 4943363 (1990-07-01), Zejda

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