Work-in-process storage pod

Details Work-in-process storage pod Work-in-process storage pod

1994-05-20

1995-11-07

Kunemund, Robert

Coating apparatus

Gas or vapor deposition

Multizone chamber

118715, 454187, C23C 1600

Patent

active

054644755

ABSTRACT:
An improved machine for performing a manufacturing process on a workpiece. The machine includes a cabinet defining an interior workspace for performing the manufacturing process. The workpiece is placed in the workspace by an operator. The cabinet is coupled with a gas source for receiving a flow of gas from the gas source. The improvement comprises a first aperture in the cabinet providing access to an interior chamber within the cabinet. The interior chamber has an interior surface and an open end aligned with the first aperture for storing a work-in-process unit. The interior chamber is accessible to the operator for transferring the work-in-process unit between the interior chamber and the workspace. The improvement further comprises a second aperture in the interior surface of the interior chamber, the second aperture admitting the flow of gas from the gas source to establish a laminar flow of the gas in the chamber intermediate the first aperture and the second aperture.

REFERENCES:
patent: 4205623 (1980-06-01), Mahl
patent: 5139459 (1992-08-01), Takahashi
G. J. Horky IBM Technical Disclosure Bulletin vol. 19 No. 12 May 1977.

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