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Damage-free sculptured coating deposition

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Darkspace shield for improved RF transmission in inductively...

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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DC magnetron sputtering method and apparatus

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Defect-induced control of the structure of boron nitride

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Deposited film producing process, photovoltaic device...

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Depositing different materials on a substrate

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Deposition apparatus and method for enhancing step coverage and

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Deposition methods and apparatus

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Deposition methods and stacked film formed thereby

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Deposition of films onto large area substrates using modified re

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Deposition of highly doped silicon dioxide films

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Deposition of LiCoO 2

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Deposition of smooth aluminum films

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Deposition of smooth aluminum films

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Deposition of thin films of multicomponent materials

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Design for sputter targets to reduce defects in refractory metal

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Desmearing and plated-through-hole method

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Device and method for coating objects at a high temperature

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Device and method for coating substrates in a vacuum...

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Device and method for depositing metal oxide films

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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