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Tailored barrier layer which provides improved copper...

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Target and method of optimizing target profile

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Target and process for its production, and method for...

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Target and process for its production, and method for...

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Target assembly for ion beam sputter deposition with...

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Target assembly having inner and outer targets

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Target comprising thickness profiling for an RF magnetron

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Target for reactive sputtering and film-forming method using the

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Target for sputtering and a method for manufacturing a...

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Target for use in magnetron sputtering of aluminum for forming m

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Target for use in magnetron sputtering of aluminum for...

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Target for use in magnetron sputtering of nickel for forming met

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Target misalignment detector

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Target sidewall design to reduce particle generation during...

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Targets for cathode sputtering

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Technique for deposition of multilayer interference thin...

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Techniques of printing micro-structure patterns such as...

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Technology for fabrication of a micromagnet on a tip of a...

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Temperable low emissivity and reflective windows

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Temperature control of a substrate

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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