Tailored barrier layer which provides improved copper...
Target and method of optimizing target profile
Target and process for its production, and method for...
Target and process for its production, and method for...
Target assembly for ion beam sputter deposition with...
Target assembly having inner and outer targets
Target comprising thickness profiling for an RF magnetron
Target for reactive sputtering and film-forming method using the
Target for sputtering and a method for manufacturing a...
Target for use in magnetron sputtering of aluminum for forming m
Target for use in magnetron sputtering of aluminum for...
Target for use in magnetron sputtering of nickel for forming met
Target misalignment detector
Target sidewall design to reduce particle generation during...
Targets for cathode sputtering
Technique for deposition of multilayer interference thin...
Techniques of printing micro-structure patterns such as...
Technology for fabrication of a micromagnet on a tip of a...
Temperable low emissivity and reflective windows
Temperature control of a substrate