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AC powered system for continuous deposition of a cathode...

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Acoustic streaming of condensate during sputtered metal...

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Acoustically enhanced deposition processes, and systems for...

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Active shield for generating a plasma for sputtering

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Adhering metal to glass

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Adhering metal to glass

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Adhesion layer for tungsten deposition

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Adhesive strength increasing method for metal thin film

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Adjustment of deposition uniformity in an inductively coupled pl

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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AlCu electromigration (EM) resistance

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Alignment mark shielding ring and method of using

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Alignment mark shielding ring without arcing defect and...

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Alternate steps of IMP and sputtering process to improve...

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Alternating current rotatable sputter cathode

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Alternating current rotatable sputter cathode

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Aluminum hole filling method using ionized metal adhesion layer

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Aluminum nitride deposition using an AlN/Al sputter cycle techni

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Aluminum sputtering while biasing wafer

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Aluminum sputtering while biasing wafer

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Annealed low emissivity coating

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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