AC powered system for continuous deposition of a cathode...
Acoustic streaming of condensate during sputtered metal...
Acoustically enhanced deposition processes, and systems for...
Active shield for generating a plasma for sputtering
Adhering metal to glass
Adhering metal to glass
Adhesion layer for tungsten deposition
Adhesive strength increasing method for metal thin film
Adjustment of deposition uniformity in an inductively coupled pl
AlCu electromigration (EM) resistance
Alignment mark shielding ring and method of using
Alignment mark shielding ring without arcing defect and...
Alternate steps of IMP and sputtering process to improve...
Alternating current rotatable sputter cathode
Alternating current rotatable sputter cathode
Aluminum hole filling method using ionized metal adhesion layer
Aluminum nitride deposition using an AlN/Al sputter cycle techni
Aluminum sputtering while biasing wafer
Aluminum sputtering while biasing wafer
Annealed low emissivity coating