Deposition of LiCoO 2

Details Deposition of LiCoO 2 Deposition of LiCoO 2

2011-06-14

2011-06-14

McDonald, Rodney G (Department: 1724)

Chemistry: electrical and wave energy

Processes and products

Coating, forming or etching by sputtering

C204S192120, C204S192220

Reexamination Certificate

active

07959769

ABSTRACT:
In accordance with the present invention, deposition of LiCoO2layers in a pulsed-dc physical vapor deposition process is presented. Such a deposition can provide a low-temperature, high deposition rate deposition of a crystalline layer of LiCoO2with a desired (101) or (003) orientation. Some embodiments of the deposition addresses the need for high rate deposition of LiCoO2films, which can be utilized as the cathode layer in a solid state rechargeable Li battery. Embodiments of the process according to the present invention can eliminate the high temperature (>700° C.) anneal step that is conventionally needed to crystallize the LiCoO2layer. Some embodiments of the process can improve a battery utilizing the LiCoO2layer by utilizing a rapid thermal anneal process with short ramp rates.

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