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Ultra-high vacuum apparatus and method for high productivity phy

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Patent

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Ultrasonic enhancement of aluminum step coverage and apparatus

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Ultraviolet filters with enhanced weatherability and method...

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Underlayer doping in thin film magnetic recording media

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Unique passivation technique for a CVD blocker plate to...

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Use of calcium and strontium dopants to improve retention perfor

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Use of heavy halogens for enhanced facet etching

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Use of modulated inductive power and bias power to reduce...

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Use of RF biased ESC to influence the film properties of Ti...

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Use of variable impedance having rotating core to control...

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Use of variable impedance to control coil sputter distribution

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Use of variable impedance to control coil sputter distribution

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Use of variable RF generator to control coil voltage...

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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