Depositing different materials on a substrate

Details Depositing different materials on a substrate Depositing different materials on a substrate

1993-12-03

1995-10-03

Weisstuch, Aaron

Chemistry: electrical and wave energy

Processes and products

Coating, forming or etching by sputtering

20429804, 20429807, 20429826, 20429827, C23C 1446

Patent

active

054549191

ABSTRACT:
An apparatus and method for depositing multiple layer, thin optical films onto a substrate and an optical filter made thereby. The apparatus includes a vacuum chamber; moving means for moving the substrate between regions of the vacuum chamber; material depositing means within each region for depositing a film of material on the substrate; a reactive substance source for introducing a reactive substance into each region so as to react with the material as it is deposited in that region; and control means for controlling the degree of such reaction in one region relative to the other, to obtain desired stoichiometry in the deposited materials. The method includes moving the substrate between regions; depositing different materials on the substrate in respective regions; introducing a reactive substance into each region so as to react with the material as it is deposited in that region; and controlling degree of reaction in one region relative to that in another region to obtain a desired stoichiometry in the deposited materials.

REFERENCES:
patent: 4604181 (1986-08-01), Mirtich et al.
patent: 4793908 (1988-12-01), Scott et al.
patent: 4851095 (1989-07-01), Scobey et al.
patent: 4975168 (1990-12-01), Ohno et al.
patent: 5015353 (1991-05-01), Hubler et al.
patent: 5080455 (1992-01-01), King
patent: 5089104 (1992-02-01), Kanda et al.
patent: 5122252 (1992-06-01), Latz et al.
patent: 5229194 (1993-07-01), Lingle et al.
patent: 5240583 (1993-08-01), Ahonen
patent: 5296122 (1994-03-01), Katsube et al.
patent: 5308461 (1994-05-01), Ahonen
W. Laznovsky, "Advances in Low-Energy Ion Beam Technology", Vacuum Technology, Aug. 1975.

Affiliated with

Also associated with

Rating

Depositing different materials on a substrate does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Depositing different materials on a substrate, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Depositing different materials on a substrate will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1075308