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Self-aligned contact process

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Self-aligned contact process comprising a two-layer spacer where

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Self-aligned contact process for a crown shaped dynamic...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Self-aligned contact process using a poly-cap mask

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Self-aligned contact process using stacked spacers

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Self-aligned contact structure and method

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Self-aligned contact structure and process for forming...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Self-aligned contact structure with raised source and drain

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Self-aligned contacts to gates

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Self-aligned damascene gate formation with low gate resistance

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Self-aligned damascene gate with contact formation

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Self-aligned damascene interconnect

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Self-aligned deep trench DRAM array device

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Self-aligned differential oxidation in trenches by ion...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Self-aligned diffused source vertical transistors with deep tren

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Self-aligned diffused source vertical transistors with stack cap

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Self-aligned double gate mosfet with separate gates

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Self-aligned double-gate MOSFET by selective epitaxy and...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Self-aligned drain/channel junction in vertical pass...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Self-aligned dual stressed layers for NFET and PFET

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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