Integrated MEMS packaging

Integrated method for release and passivation of MEMS...

Integrated micro electro-mechanical system and manufacturing...

Integrated micro electro-mechanical system and manufacturing...

Integrated micromechanical sensor device and process for produci

Integrated released beam sensor for sensing acceleration and...

Integrated sensor having plurality of released beams for...

Integration manufacturing process for MEMS device

Isolated metal plug process for use in fabricating carbon...

Isolated metal plug process for use in fabricating carbon...

Isolation process for surface micromachined sensors and actuator

Laminate-based apparatus and method of fabrication

Latching zip-mode actuated mono wafer MEMS switch method

Lateral polysilicon beam process

Low cost packaging for thin-film resonators and thin-film resona

Low pressure sensor with a thin boss and method of manufacture

Low temperature Bi-CMOS compatible process for MEMS RF...

Low temperature ceramic microelectromechanical structures

Manufacture of MEMS structures in sealed cavity using...

Manufacture process of quartz vibrator