Semiconductor pressure detecting device and manufacturing method
Semiconductor probe with resistive tip and method of...
Semiconductor sensor with suspended microstructure and method fo
Semiconductor strain gauge and the manufacturing method
Sensor device and method of forming a sensor device
Sensor element with trenched cavity
Sensor element with trenched cavity
Sensor with at least one micromechanical structure, and...
SI wafer-cap wafer bonding method using local laser energy,...
Side port package for micromachined fluid sensor
Side-bonding method of flip-chip semiconductor device, MEMS...
Silicon device manufacturing method, silicon device, and...
Silicon pressure sensor and the manufacturing method thereof
Silicon undercut prevention in sacrificial oxide release...
Silicon-based RF system and method of manufacturing the same
Single crystal, dual wafer, tunneling sensor or switch with...
Single proof mass, 3 axis MEMS transducer
Stack type surface acoustic wave package, and method for...
Stacked via-stud with improved reliability in copper metallurgy
Stress-controlled dielectric integrated circuit