Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Physical stress responsive
Reexamination Certificate
2005-08-30
2005-08-30
Chapman, John E. (Department: 2856)
Semiconductor device manufacturing: process
Making device or circuit responsive to nonelectrical signal
Physical stress responsive
Reexamination Certificate
active
06936492
ABSTRACT:
A transducer is provided herein which comprises an unbalanced proof mass (51), and which is adapted to sense acceleration in at least two mutually orthogonal directions. The proof mass (51) has first (65) and second (67) opposing sides that are of unequal mass.
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Koury, Jr. Daniel N.
Li Gary
McNeil Andrew C.
Chapman John E.
Fortkort John A.
Fortkort Grether & Kelton LLP
Freescale Semiconductor Inc.
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