Micromechanical component and manufacturing method

Micromechanical component and method for fabricating a...

Micromechanical component and suitable method for its...

Micromechanical device and method for its production

Micromechanical device and method of manufacture thereof

Micromechanical device latching

Micromechanical device with thinned cantilever structure and...

Micromechanical diaphragm sensor having a double diaphragm

Micromechanical structural element having a diaphragm and...

Micromirror manufacturing method

Microstructure and manufacturing method thereof and...

Microstructure and single mask, single-crystal process for fabri

Microstructure devices, methods of forming a microstructure...

Mitigation of high stress areas in vertically offset structures

Monolithic IC and MEMS microfabrication process

Monolithic single pole double throw RF MEMS switch

Multi-chip semiconductor package structure

Multi-functional micro electromechanical devices and method...

Multi-metal layer MEMS structure and process for making the...

Multi-scale cantilever structures having nano sized holes...