Micromechanical device latching

Details Micromechanical device latching Micromechanical device latching

2005-08-30

2005-08-30

Le, Thao P. (Department: 2818)

Semiconductor device manufacturing: process

Making device or circuit responsive to nonelectrical signal

Physical stress responsive

C438S048000, C438S057000

Reexamination Certificate

active

06936493

ABSTRACT:
A micromechanical latching system usable to achieve small element stabilization during and following the fabrication of a MEMS device. Realization of sliding latching elements from semiconductor materials such as polysilicon using integrated circuit techniques is included. Provisions for manual manipulation of the latching elements between unlatched and latched conditions are also included along with two exemplary MEMS device applications of the latching system. The achieved latching system contributes to substrate interference free improved flip-chip fabrication of Integrated Microsystem micromechanical devices by way enabling improved alignment accuracy processing.

REFERENCES:
patent: 5994159 (1999-11-01), Aksyuk et al.
patent: 6300156 (2001-10-01), Decker et al.
patent: 6396975 (2002-05-01), Wood et al.
patent: 6396976 (2002-05-01), Little et al.
patent: 6404942 (2002-06-01), Edwards et al.
patent: 6470110 (2002-10-01), Lin
patent: 6600850 (2003-07-01), Fan
patent: 6681063 (2004-01-01), Kane et al.
patent: 2001/0040675 (2001-11-01), True et al.
patent: 2002/0021860 (2002-02-01), Ruan et al.
patent: 2002/0025106 (2002-02-01), Raccio
patent: 2002/0168144 (2002-11-01), Chen et al.
Pister et al., “Microfabricated Hinges”, Sensors and Actuators, 1992, pp. 249-256, vol. A33, Elsevier Sequoia.

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