Preloaded linear beam vibration sensor and its manufacturing met

Details Preloaded linear beam vibration sensor and its manufacturing met Preloaded linear beam vibration sensor and its manufacturing met

1995-09-14

1997-05-13

Chapman, John E.

Semiconductor device manufacturing: process

Making device or circuit responsive to nonelectrical signal

Physical stress responsive

7351432, 73654, 438739, H01G 518

Patent

active

056292430

ABSTRACT:
A method is described for manufacturing a miniaturized accelerometer having a narrow bandwidth and behaving as a switch sensitive only to low frequencies such as are contained in earthquakes. The method includes provision of an unbalanced see-saw beam assembly composed of beams 2 and masses 3 at opposite ends of the beams 2. The beams 2 have their suspension at a location with slightly different distances from the masses 3 along a line parallel to and vertically offset from the line connecting centers of gravity of the masses 3.

REFERENCES:
patent: 4736629 (1988-04-01), Cole

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