Shallow trench isolation process using oxide deposition and...
Shallow trench isolation region in semiconductor device and...
Shallow trench isolation spacer for weff improvement
Shallow trench isolation structure and method
Shallow trench isolation structure and method of forming the sam
Shallow trench isolation structure compatible with SOI...
Shallow trench isolation structure for laser thermal processing
Shallow trench isolation structure for strained Si on SiGe
Shallow trench isolation structure with converted liner layer
Shallow trench isolation structure with low sidewall...
Shallow trench isolation structures and a method for forming...
Shallow trench isolation structures comprising a graded...
Shallow trench isolation technique
Shallow trench isolation technology to eliminate a kink effect
Shallow trench isolation type semiconductor device and...
Shallow trench isolation type semiconductor device and...
Shallow trench isolation type semiconductor device and...
Shallow trench isolation type semiconductor device and...
Shallow trench isolation using non-conformal dielectric and...
Shallow trench isolation using TEOS cap and polysilicon...