Radiation hardening method for shallow trench isolation in CMOS
Recessed gate electrode MOS transistor and method for...
Recessed shallow trench isolation structure nitride liner and me
Recessed silicon oxidation for devices such as a CMOS SOI ICs
Reducing non-uniformity in a refill layer thickness for a semico
Reduction of mechanical stress in shallow trench isolation...
Reduction of negative bias temperature instability in narrow...
Reversible oxidation protection of microcomponents