Plasma treatment of low dielectric constant dielectric...
Plasma-enhanced oxide process optimization and material and appa
Plural treatment step process for treating dielectric films
PMOS transistor with compressive dielectric capping layer
Poly(organosiloxane) materials and methods for hybrid...
Polyimide coating process with dilute TMAH and DI-water...
Polymeric dielectric layers having low dielectric constants and
Polymers and photoresist compositions for short wavelength...
Polyparaxylylene film, production method therefor and...
Porous dielectric material with improved pore surface properties
Porous insulating film, method for producing the same, and...
Porous materials
Porous organosilicate layers, and vapor deposition systems...
Porous organosilicate layers, and vapor deposition systems...
Porous organosilicates with improved mechanical properties
Porous silicon oxycarbide integrated circuit insulator
Porous silicon oxycarbide integrated circuit insulator
Porous underlayer coating and underlayer coating forming...
Porous underlayer coating and underlayer coating forming...
Post deposition plasma treatment to increase tensile stress...