Silicon dioxide-oxynitride continuity film as a passivation...

Silicon nitride film, semiconductor device, and method for...

Silicon-containing resist to pattern organic low k-dielectrics

Sputtering film forming method, sputtering film forming...

Stress management for tensile films

Structures containing titanium silicon oxide

Structures with improved interfacial strength of SiCOH...

Substrate flattening method and film-coated substrate made...

Substrate processing method and substrate processing apparatus

Surface micromachining process of MEMS ink jet drop ejectors...

System and method for forming a uniform thin gate oxide layer

System and method for forming an integrated barrier layer

System and method for forming an integrated barrier layer

System and method for manufacturing semiconductor devices...

Techniques for improving adhesion of silicon dioxide to titanium

Thermal compensation method for forming semiconductor...

Thin film deposition apparatus

Thin oxides of silicon

Titanium boronitride layer for high aspect ratio...

Transistor device and method of forming the same