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Silicon pillars for vertical transistors

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
Reexamination Certificate

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Silicon precursors for deep trench silicon etch processes

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Silicon processing method

Semiconductor device manufacturing: process – Chemical etching – Altering etchability of substrate region by compositional or...
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Silicon recess improvement through improved post implant...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Silicon sidewall etching

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Silicon stencil mask manufacturing method

Semiconductor device manufacturing: process – Chemical etching – Having liquid and vapor etching steps
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Silicon trench etch using silicon-containing precursors to...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Silicon wafer etching process and composition

Semiconductor device manufacturing: process – Chemical etching – Liquid phase etching
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Silicon wafer manufacturing method eliminating final mirror-poli

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
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Silicon wafer reclamation process

Semiconductor device manufacturing: process – Chemical etching – Liquid phase etching
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Silicon wafer storage water and silicon wafer storage method

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
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Silicon wafering process flow

Semiconductor device manufacturing: process – Chemical etching
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Silylation process for forming contacts

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Simplified dual damascene process

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Simplified etching technique for producing multiple undercut...

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
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Simplified pitch doubling process flow

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Simplified pitch doubling process flow

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
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Simplified pitch doubling process flow

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Simplified sidewall formation for sidewall patterning of sub...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Simultaneous deposit and etch method for forming a void-free and

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
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