In-situ balancing for phase-shifting mask
In-situ barc and nitride etch process
In-situ chemical composition monitor on wafer during plasma...
In-situ chemical-mechanical planarization pad metrology...
In-situ corner rounding during oxide etch for improved plug fill
In-situ discharge to avoid arcing during plasma etch processes
In-situ etch of BARC layer during formation of local interconnec
In-situ etch of multiple layers during formation of local...
In-situ feedback system for localized CMP thickness control
In-situ fluid jet orifice
In-situ gate etch process for fabrication of a narrow gate...
In-situ integrated oxide etch process particularly useful...
In-situ mask technique for producing III-V semiconductor...
In-situ method for preparing and highlighting of defects for fai
In-situ method for producing a hydrogen terminated...
In-situ P doped amorphous silicon by NH3 to form oxidation resis
In-situ photoresist removal by an attachable chamber with...
In-situ plasma ash/treatment after via etch of low-k films...
In-situ plasma etch for TERA hard mask materials
In-situ process for fabricating a semiconductor device with...