Chemical consolidation of photoresists in the UV range
Chemical functionalization of surfaces
Chemical functionalization of surfaces
Chrome mask etch
Class of E-beam resists based on conducting organic charge trans
Class of E-beam resists based on conducting organic charge trans
Conductive bi-layer e-beam resist with amorphous carbon
Control of valley current in a unijunction transistor by electro
Controlled removal of electron beam curable coatings and article
Critical dimension edge placement and slope enhancement with...
Deposition of metal films and clusters by reactions of compounds
Device fabrication entailing submicron imaging
Device manufacture involving lithographic processing
Devices for measuring and adjusting illumination uniformity...
Direct-write afocal electron-beam semiconductor lithography
Dry developable photoresist and use thereof
Dry development method for a resist film and an apparatus theref
Dry Lithographic Process
Dry multilayer inorganic alloy thermal resist for...
Dry process for the production of microelectronic devices