Acetylene terminated, branched polyphenylene resist and protecti
Active energy beam curing type conductive paste, production...
Alignment marks for electron beam lithography
Anti-charging layer for beam lithography and mask fabrication
Anti-charging layer for beam lithography and mask fabrication
Apparatus and a method for forming a pattern using a crystal...
Apparatus and method for conformal mask manufacturing
Aqueous developable poly(olefin sulfone) terpolymers
Blocked monomer and polymers therefrom for use as photoresists
Border modification for proximity effect correction in...
Carbonized antireflective coating produced by spin-on polymer ma
Charged beam lithography method
Charged particle beam exposure method
Charged particle beam exposure method utilizing partial...
Charged particle beam pattern-transfer method utilizing non-unif
Charged particle beam projection method
Charged particle beam transfer method
Charged particle beam transfer method
Charged-particle-beam microlithography methods exhibiting...
Charged-particle-beam projection-exposure methods exhibiting...