Carbonized antireflective coating produced by spin-on polymer ma
Charged beam lithography method
Charged particle beam exposure method
Charged particle beam exposure method utilizing partial...
Charged particle beam pattern-transfer method utilizing non-unif
Charged particle beam projection method
Charged particle beam transfer method
Charged particle beam transfer method
Charged-particle-beam microlithography methods exhibiting...
Charged-particle-beam projection-exposure methods exhibiting...
Chemical consolidation of photoresists in the UV range
Chemical functionalization of surfaces
Chemical functionalization of surfaces
Chrome mask etch
Class of E-beam resists based on conducting organic charge trans
Class of E-beam resists based on conducting organic charge trans
Conductive bi-layer e-beam resist with amorphous carbon
Control of valley current in a unijunction transistor by electro
Controlled removal of electron beam curable coatings and article
Critical dimension edge placement and slope enhancement with...