(Cyclo)aliphatic epoxy compounds
(Meth) acrylate derivative, polymer and photoresist...
(Meth)acrylate compound having aromatic acid labile group,...
(Meth)acrylate derivative, polymer and photoresist...
(Meth)acrylate, polymer photoresist composition, and pattern...
(Meth)acrylate, polymer, photoresist composition, and...
(Meth)acrylates containing urethane groups
(Meth)acrylates having lactone structure, polymers,...
.alpha.,.beta. Diketone containing polymers as positive photores
0.3 Micron aperture width patterning process
1,3-Diaza-9-thia-anthracene-2,4-diones and photopolymerizable mi
1,4 or 9,10 dimethoxyanthracene triggers for 2-tri(chloro or bro
1,4-dihydropyridine-containing IR-sensitive composition and...
10-Phenyl-1,3,9-triazaanthracenes and photopolymerizable mixture
193 nm positive-working photoresist composition
193nm resist with improved post-exposure properties
1Postitve-working imaging composition and element and method of
2-(Halogenomethyl-phenyl)-4-halogeno-oxaxole derivatives, a proc
2-acylamino-9-arylacridines, process for their preparation and p
2-cyano-3,3-diarylacrylate UV dyes for laser recording process