Deposition of metal films and clusters by reactions of compounds
Device fabrication entailing submicron imaging
Device manufacture involving lithographic processing
Devices for measuring and adjusting illumination uniformity...
Direct-write afocal electron-beam semiconductor lithography
Dry developable photoresist and use thereof
Dry development method for a resist film and an apparatus theref
Dry Lithographic Process
Dry multilayer inorganic alloy thermal resist for...
Dry process for the production of microelectronic devices
Dry-developed, negative working electron resist system
Dual layer workpiece masking and manufacturing process
Dual layer workpiece masking and manufacturing process