Device manufacture involving lithographic processing

Details Device manufacture involving lithographic processing Device manufacture involving lithographic processing

1994-04-29

2000-11-21

Schilling, Richard L.

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Electron beam imaging

430 4, 430 5, 430311, 430395, 430396, 430942, 355 71, 359738, 359888, 359894, B05D 512, B05D 306, B05D 304

Patent

active

RE0369640

ABSTRACT:
Fabrication of devices of micron and submicron minimum feature size is accomplished by lithographic processing involving a back focal plane filter. A particularly important fabrication approach depends upon mask patterns which produce images based on discrimination as between scattered and unscattered radiation by accelerated electrons.

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