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Dry etching apparatus, dry etching method, and plate and...

Etching a substrate: processes – Etching and coating occur in the same processing chamber
Reexamination Certificate

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Dry etching gas

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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Dry etching gas and method for dry etching

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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Dry etching method

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant
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Dry etching method

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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Dry etching method

Etching a substrate: processes – Gas phase etching of substrate
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Dry etching method

Etching a substrate: processes – Gas phase etching of substrate – Etching a multiple layered substrate where the etching...
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Dry etching method

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
Patent

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Dry etching method

Etching a substrate: processes – Gas phase etching of substrate – With measuring – testing – or inspecting
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Dry etching method

Etching a substrate: processes – Forming or treating electrical conductor article – Forming or treating of groove or through hole
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Dry etching method

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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Dry etching method

Etching a substrate: processes – Gas phase etching of substrate – Etching a multiple layered substrate where the etching...
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Dry etching method and apparatus for use in the LCD device

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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Dry etching method and manufacturing method of manufacturing EL

Etching a substrate: processes – Forming or treating a sign or material useful in a sign – Sign or material is electroluminescent
Patent

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Dry etching method for magnetic material

Etching a substrate: processes – Forming or treating article containing magnetically...
Reissue Patent

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Dry etching method for magnetic material

Etching a substrate: processes – Forming or treating article containing magnetically...
Reexamination Certificate

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Dry etching method for oxide semiconductor film

Etching a substrate: processes – Gas phase etching of substrate
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Dry etching method of multilayer film

Etching a substrate: processes – Etching of semiconductor material to produce an article...
Patent

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Dry etching method, fine structure formation method, mold...

Etching a substrate: processes – Gas phase etching of substrate
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Dry etching method, fine structure formation method, mold...

Etching a substrate: processes – Gas phase etching of substrate
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